Cathodoluminescence nano-characterization of semiconductors
نویسندگان
چکیده
منابع مشابه
Cathodoluminescence Hyperspectral Imaging of Nitride Semiconductors: Introducing New Variables
Cathodoluminescence (CL) hyperspectral imaging—the acquisition of a full optical emission spectrum at each pixel of an image—has become firmly established as a measurement mode in scanning electron microscopy (SEM) [1]. CL is sensitive to the structural, compositional and electrical properties of a sample, and the inherent multimode nature of SEM makes it possible to combine CL with other techn...
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ژورنال
عنوان ژورنال: Semiconductor Science and Technology
سال: 2011
ISSN: 0268-1242,1361-6641
DOI: 10.1088/0268-1242/26/6/064005